Влияние условий ионного облучения на эффективность азотирования алюминия

Authors

  • И И Марченко

DOI:

https://doi.org/10.20998/%25x

Abstract

Методами компьютерного моделирования исследовано влияние толщины оксидного слоя на эффективность ионного азотирования алюминия. Были получены профили проникновения ионов азота с энергией 1-5 кэВ в алюминий при различных толщинах оксидного слоя. Рассчитаны интегральные коэффициенты распыления мишени.

References

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How to Cite

Марченко, И. И. (2017). Влияние условий ионного облучения на эффективность азотирования алюминия. Bulletin of National Technical University "KhPI". Series: System Analysis, Control and Information Technologies, (26), 62–67. https://doi.org/10.20998/%x

Issue

No. 26 (2008)

Section

SYSTEM ANALYSIS AND DECISION-MAKING THEORY

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Copyright (c) 2017 Bulletin of NTU “Kharkiv Polytechnic Institute”. Series: System Analysis, Control and Information Technologies

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